Toshihiro AIDA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for supplying mixed gas
- Patent number 9,533,268
- Issue date Jan 3, 2017
- Iwatani Corporation
- Kunihiko Koike
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate cleaning apparatus and vacuum processing system
- Patent number 9,214,364
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Kazuya Dobashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dividing method for wafer
- Patent number 9,159,622
- Issue date Oct 13, 2015
- Disco Corporation
- Sakae Matsuzaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DIVIDING METHOD FOR WAFER
- Publication number 20150044857
- Publication date Feb 12, 2015
- Disco Corporation
- Sakae Matsuzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING MIXED GAS
- Publication number 20150020890
- Publication date Jan 22, 2015
- IWATANI CORPORATION
- Kunihiko KOIKE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND VACUUM PROCESSING SYSTEM
- Publication number 20120247670
- Publication date Oct 4, 2012
- IWATANI CORPORATION
- Kazuya DOBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...