Toshihiro Hayami

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma control apparatus
- Patent number 11,195,697
- Issue date Dec 7, 2021
- SPP Technologies Co., Ltd.
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal filling apparatus
- Patent number 9,199,303
- Issue date Dec 1, 2015
- Sumitomo Precision Products Co., LTD
- Yukitaka Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processor
- Patent number 8,852,388
- Issue date Oct 7, 2014
- SPP Technologies Co., Ltd.
- Toshihiro Hayami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 8,771,461
- Issue date Jul 8, 2014
- SPP Technologies Co., Ltd.
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting etching endpoint, and etching apparatus and et...
- Patent number 6,669,810
- Issue date Dec 30, 2003
- Sumitomo Metal Industries, Ltd.
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Etching apparatus and etching system using the method thereof
- Patent number 6,149,761
- Issue date Nov 21, 2000
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,092,486
- Issue date Jul 25, 2000
- Sumimoto Metal Indsutries, Ltd.
- Hiroshi Mabuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus utilizing a microwave window having a t...
- Patent number 6,091,045
- Issue date Jul 18, 2000
- Sumitomo Metal Industries, Inc.
- Hiroshi Mabuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 5,951,887
- Issue date Sep 14, 1999
- Sumitomo Metal Industries, Ltd.
- Hiroshi Mabuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for detecting etching endpoint, and etching apparatus and et...
- Patent number 5,885,472
- Issue date Mar 23, 1999
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma processing apparatus
- Patent number 5,705,019
- Issue date Jan 6, 1998
- Sumitomo Metal Industries, Ltd.
- Minoru Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting etching endpoint and etching apparatus and etc...
- Patent number 5,626,714
- Issue date May 6, 1997
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA CONTROL APPARATUS
- Publication number 20180315581
- Publication date Nov 1, 2018
- SPP TECHNOLOGIES CO., LTD.
- Toshihiro HAYAMI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Plasma Processing Apparatus and Coil Used Therein
- Publication number 20160358748
- Publication date Dec 8, 2016
- SPP TECHNOLOGIES CO., LTD.
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating Device and Plasma Processing Apparatus Provided Therewith
- Publication number 20160153091
- Publication date Jun 2, 2016
- SPP TECHNOLOGIES CO., LTD.
- Toshihiro Hayami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Apparatus and Opening and Closing Mechanism used...
- Publication number 20160118225
- Publication date Apr 28, 2016
- SPP TECHNOLOGIES CO., LTD.
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal Filling Apparatus
- Publication number 20140246163
- Publication date Sep 4, 2014
- SUMITOMO PRECISION PRODUCTS CO., LTD.
- Yukitaka Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110005684
- Publication date Jan 13, 2011
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSOR
- Publication number 20100043973
- Publication date Feb 25, 2010
- Toshihiro Hayami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Toshihiro Hayami

Person

Patents Grantslast 30 patents

Plasma control apparatus

Metal filling apparatus

Plasma processor

Plasma processing apparatus

Method for detecting etching endpoint, and etching apparatus and et...

Etching apparatus and etching system using the method thereof

Plasma processing apparatus and plasma processing method

Plasma processing apparatus utilizing a microwave window having a t...

Plasma processing apparatus and plasma processing method

Method for detecting etching endpoint, and etching apparatus and et...

Plasma processing apparatus

Method for detecting etching endpoint and etching apparatus and etc...

Patents Applicationslast 30 patents

PLASMA CONTROL APPARATUS

Plasma Processing Apparatus and Coil Used Therein

Heating Device and Plasma Processing Apparatus Provided Therewith

Plasma Processing Apparatus and Opening and Closing Mechanism used...

Metal Filling Apparatus

PLASMA PROCESSING APPARATUS

PLASMA PROCESSOR