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Toshihiro Kawai

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Patents Grantslast 30 patents

  • Information Patent Grant

    Equipment front end module
    • Patent number 12,201,995
    • Issue date Jan 21, 2025
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • B08 - CLEANING
  • Information Patent Grant

    EFEM and method of controlling supply amount of inert gas
    • Patent number 12,087,606
    • Issue date Sep 10, 2024
    • Sinfonia Technology Co., Ltd.
    • Masahiro Osawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Sealing equipment
    • Patent number 12,055,220
    • Issue date Aug 6, 2024
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    EFEM
    • Patent number 12,027,398
    • Issue date Jul 2, 2024
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    EFEM
    • Patent number 12,002,693
    • Issue date Jun 4, 2024
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Conveyance system for transferring frame wafer
    • Patent number 11,851,289
    • Issue date Dec 26, 2023
    • Sinfonia Technology Co., Ltd.
    • Hiroaki Nakamura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer stocker
    • Patent number 11,823,934
    • Issue date Nov 21, 2023
    • Sinfonia Technology Co., Ltd.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer chamber
    • Patent number 11,823,923
    • Issue date Nov 21, 2023
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Transport system
    • Patent number 11,710,652
    • Issue date Jul 25, 2023
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer stocker
    • Patent number 11,610,797
    • Issue date Mar 21, 2023
    • Sinfonia Technology Co., Ltd.
    • Yasushi Taniyama
    • F24 - HEATING RANGES VENTILATING
  • Information Patent Grant

    EFEM
    • Patent number 11,495,481
    • Issue date Nov 8, 2022
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer chamber
    • Patent number 11,424,145
    • Issue date Aug 23, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Equipment front end module
    • Patent number 11,322,378
    • Issue date May 3, 2022
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Door opening/closing system, and load port equipped with door openi...
    • Patent number 10,930,537
    • Issue date Feb 23, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas injection device
    • Patent number 10,923,372
    • Issue date Feb 16, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer chamber
    • Patent number 10,672,632
    • Issue date Jun 2, 2020
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
  • Information Patent Grant

    Transfer chamber
    • Patent number 10,658,217
    • Issue date May 19, 2020
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Robot transport device
    • Patent number 10,636,680
    • Issue date Apr 28, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Takashi Shigeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Door opening/closing system, and load port equipped with door openi...
    • Patent number 10,586,723
    • Issue date Mar 10, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    EFEM
    • Patent number 9,704,727
    • Issue date Jul 11, 2017
    • Sinfonia Technology Co., Ltd.
    • Mikio Segawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    EFEM AND METHOD OF CONTROLLING SUPPLY AMOUNT OF INERT GAS
    • Publication number 20240420980
    • Publication date Dec 19, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Masahiro Osawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM
    • Publication number 20240355652
    • Publication date Oct 24, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Gengoro Ogura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM
    • Publication number 20240282606
    • Publication date Aug 22, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    EFEM
    • Publication number 20240153797
    • Publication date May 9, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Gengoro Ogura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20240038554
    • Publication date Feb 1, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    WAFER STOCKER
    • Publication number 20230207367
    • Publication date Jun 29, 2023
    • SINFONIA TECHNOLOGY CO., LTD.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM
    • Publication number 20230077810
    • Publication date Mar 16, 2023
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM
    • Publication number 20230073234
    • Publication date Mar 9, 2023
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM AND METHOD OF CONTROLLING SUPPLY AMOUNT OF INERT GAS
    • Publication number 20230066029
    • Publication date Mar 2, 2023
    • SINFONIA TECHNOLOGY CO., LTD.
    • Masahiro Osawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYANCE SYSTEM
    • Publication number 20230033168
    • Publication date Feb 2, 2023
    • SINFONIA TECHNOLOGY CO., LTD.
    • Hiroaki Nakamura
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    EFEM
    • Publication number 20220347694
    • Publication date Nov 3, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B08 - CLEANING
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20220344182
    • Publication date Oct 27, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSPORT SYSTEM
    • Publication number 20220336245
    • Publication date Oct 20, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER STOCKER
    • Publication number 20220037184
    • Publication date Feb 3, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM
    • Publication number 20210028031
    • Publication date Jan 28, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM
    • Publication number 20210013078
    • Publication date Jan 14, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM
    • Publication number 20210013077
    • Publication date Jan 14, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEALING EQUIPMENT
    • Publication number 20210010598
    • Publication date Jan 14, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20200312686
    • Publication date Oct 1, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENI...
    • Publication number 20200168495
    • Publication date May 28, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro KAWAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ROBOT TRANSPORT DEVICE
    • Publication number 20180323086
    • Publication date Nov 8, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Takashi SHIGETA
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    GAS INJECTION DEVICE
    • Publication number 20180254209
    • Publication date Sep 6, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro KAWAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENI...
    • Publication number 20180204753
    • Publication date Jul 19, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro KAWAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20180047602
    • Publication date Feb 15, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20180040493
    • Publication date Feb 8, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
  • Information Patent Application

    EFEM
    • Publication number 20150170945
    • Publication date Jun 18, 2015
    • SINFONIA TECHNOLOGY CO., LTD.
    • Mikio Segawa
    • H01 - BASIC ELECTRIC ELEMENTS