Toshihiro KITAO

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Sapporo City, JP

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Patents Applicationslast 30 patents

Information Patent Application
ANALYSIS APPARATUS, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSI...
- Publication number 20250013213
- Publication date Jan 9, 2025
- TOKYO ELECTRON LIMITED
- Ken HIRANO
- G05 - CONTROLLING REGULATING
Information Patent Application
PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS
- Publication number 20240420359
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Toshihiro KITAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROFILE DETECTION METHOD, PROFILE DETECTION PROGRAM, AND INFORMATIO...
- Publication number 20230360190
- Publication date Nov 9, 2023
- TOKYO ELECTRON LIMITED
- Toshihiro KITAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS OPERATION OF PLASMA PROCESSING TOOL
- Publication number 20230352282
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- H01 - BASIC ELECTRIC ELEMENTS