Toshihiro KITAO

Follow

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Virtual metrology for wafer result prediction
- Patent number 12,112,107
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Jun Shinagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Virtual metrology enhanced plasma process optimization method
- Patent number 11,869,756
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Jun Shinagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Tool health monitoring and classifications with virtual metrology a...
- Patent number 11,669,079
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Jun Shinagawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TOOL HEALTH MONITORING AND CLASSIFICATIONS WITH VIRTUAL METROLOGY A...
- Publication number 20230009419
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIRTUAL METROLOGY ENHANCED PLASMA PROCESS OPTIMIZATION METHOD
- Publication number 20220406580
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VIRTUAL METROLOGY FOR WAFER RESULT PREDICTION
- Publication number 20220092242
- Publication date Mar 24, 2022
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MODEL GENERATING METHOD AND MODEL GENERATING APPARATUS
- Publication number 20210073651
- Publication date Mar 11, 2021
- TOKYO ELECTRON LIMITED
- Toshihiro KITAO
- G06 - COMPUTING CALCULATING COUNTING