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Toshihiro Miura

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  • Yamanashi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching method
    • Patent number 7,192,532
    • Issue date Mar 20, 2007
    • Tokyo Electron Limited
    • Akiteru Koh
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Dry etching method
    • Publication number 20050045588
    • Publication date Mar 3, 2005
    • Akiteru Koh
    • H01 - BASIC ELECTRIC ELEMENTS