Toshihiro NISHISAKA

Person

Oyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
EUV chamber apparatus, extreme ultraviolet light generation system,...
- Patent number 11,452,196
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Kouichiro Kouge
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
- Patent number 11,363,706
- Issue date Jun 14, 2022
- Gigaphoton Inc.
- Yutaka Shiraishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, target supply method, and electronic device m...
- Patent number 11,320,740
- Issue date May 3, 2022
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mount, extreme ultraviolet light generation system, and device manu...
- Patent number 11,061,340
- Issue date Jul 13, 2021
- Gigaphoton Inc.
- Toshihiro Nishisaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target generation device replacement trolley, target generation dev...
- Patent number 10,698,316
- Issue date Jun 30, 2020
- Gigaphoton Inc.
- Toshihiro Nishisaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tank, target generation device, and extreme-UV-light generation device
- Patent number 10,674,590
- Issue date Jun 2, 2020
- Gigaphoton Inc.
- Toshiyuki Hirashita
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,524,343
- Issue date Dec 31, 2019
- Gigaphoton Inc.
- Takanobu Ishihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target generation device and extreme ultraviolet light generation d...
- Patent number 10,372,041
- Issue date Aug 6, 2019
- Gigaphoton Inc.
- Yutaka Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target storage device
- Patent number 10,349,508
- Issue date Jul 9, 2019
- Gigaphoton Inc.
- Yutaka Shiraishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,136,510
- Issue date Nov 20, 2018
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply apparatus and EUV light generating apparatus
- Patent number 10,009,991
- Issue date Jun 26, 2018
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,429,847
- Issue date Aug 30, 2016
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,332,625
- Issue date May 3, 2016
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device
- Patent number 9,233,782
- Issue date Jan 12, 2016
- Gigaphoton Inc.
- Takanobu Ishihara
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,052,615
- Issue date Jun 9, 2015
- Gigaphoton Inc.
- Toshihiro Nishisaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chamber and extreme ultraviolet light generation apparatus
- Patent number 9,040,943
- Issue date May 26, 2015
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device
- Patent number 8,872,145
- Issue date Oct 28, 2014
- Gigaphoton Inc.
- Toshiyuki Hirashita
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Target supply apparatus, chamber, and extreme ultraviolet light gen...
- Patent number 8,785,895
- Issue date Jul 22, 2014
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply unit
- Patent number 8,779,401
- Issue date Jul 15, 2014
- Gigaphoton Inc.
- Hakaru Mizoguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device
- Patent number 8,779,402
- Issue date Jul 15, 2014
- Gigaphoton Inc.
- Takayuki Yabu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chamber apparatus and extreme ultraviolet light generation system
- Patent number 8,759,804
- Issue date Jun 24, 2014
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 8,698,111
- Issue date Apr 15, 2014
- Gigaphonton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for measuring and controlling target trajector...
- Patent number 8,324,600
- Issue date Dec 4, 2012
- Gigaphoton Inc.
- Hideyuki Hayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,212,228
- Issue date Jul 3, 2012
- Komatsu Ltd.
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Excimer laser device
- Patent number 6,577,664
- Issue date Jun 10, 2003
- Komatsu Ltd.
- Hisashi Nara
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Discharge circuit for pulsed laser and pulsed power source
- Patent number 6,389,049
- Issue date May 14, 2002
- Komatsu Ltd.
- Daisuke Yoshida
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Once through fan for excimer laser apparatus
- Patent number 6,337,872
- Issue date Jan 8, 2002
- Komatsu Ltd.
- Hisashi Nara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas controller and charging/discharging device for discharge-...
- Patent number 5,754,579
- Issue date May 19, 1998
- Komatsu Ltd.
- Hakaru Mizoguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20220015218
- Publication date Jan 13, 2022
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20210364927
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM,...
- Publication number 20210029811
- Publication date Jan 28, 2021
- Gigaphoton Inc.
- Kouichiro KOUGE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOUNT, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND DEVICE MANU...
- Publication number 20200363733
- Publication date Nov 19, 2020
- Gigaphoton Inc.
- Toshihiro NISHISAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20190289705
- Publication date Sep 19, 2019
- Gigaphoton Inc.
- Takanobu ISHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET GENERATION DEVICE REPLACEMENT TROLLEY, TARGET GENERATION DEV...
- Publication number 20190271914
- Publication date Sep 5, 2019
- Gigaphoton Inc.
- Toshihiro NISHISAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION D...
- Publication number 20190155163
- Publication date May 23, 2019
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TANK, TARGET GENERATION DEVICE, AND EXTREME-UV-LIGHT GENERATION DEVICE
- Publication number 20190008026
- Publication date Jan 3, 2019
- Gigaphoton Inc.
- Toshiyuki HIRASHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET STORAGE DEVICE
- Publication number 20180160518
- Publication date Jun 7, 2018
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20170238407
- Publication date Aug 17, 2017
- Gigaphoton Inc.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20160187787
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY APPARATUS AND EUV LIGHT GENERATING APPARATUS
- Publication number 20160165708
- Publication date Jun 9, 2016
- Gigaphoton Inc.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20150245457
- Publication date Aug 27, 2015
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20140217310
- Publication date Aug 7, 2014
- GIGAPHOTON INC.
- Toshiyuki HIRASHITA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHAMBER AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140217311
- Publication date Aug 7, 2014
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...
- Publication number 20140008552
- Publication date Jan 9, 2014
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20140001369
- Publication date Jan 2, 2014
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20130240645
- Publication date Sep 19, 2013
- Gigaphoton Inc.
- Takanobu Ishihara
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20130206863
- Publication date Aug 15, 2013
- GIGAPHOTON INC.
- Takayuki YABU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20130075625
- Publication date Mar 28, 2013
- GIGAPHOTON INC.
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...
- Publication number 20130062539
- Publication date Mar 14, 2013
- GIGAPHOTON INC.
- Hideyuki HAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY UNIT
- Publication number 20130048878
- Publication date Feb 28, 2013
- GIGAPHOTON INC.
- Hakaru MIZOGUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20120228527
- Publication date Sep 13, 2012
- Komatsu Ltd./Gigaphoton, Inc.
- Tamotsu ABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20120119118
- Publication date May 17, 2012
- GIGAPHOTON INC.
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20120104290
- Publication date May 3, 2012
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20110309260
- Publication date Dec 22, 2011
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...
- Publication number 20100294958
- Publication date Nov 25, 2010
- Hideyuki HAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20100193711
- Publication date Aug 5, 2010
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20100051832
- Publication date Mar 4, 2010
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20090224181
- Publication date Sep 10, 2009
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Toshihiro NISHISAKA

Person

Patents Grantslast 30 patents

EUV chamber apparatus, extreme ultraviolet light generation system,...

Target supply device, extreme ultraviolet light generation apparatu...

Target supply device, target supply method, and electronic device m...

Mount, extreme ultraviolet light generation system, and device manu...

Target generation device replacement trolley, target generation dev...

Tank, target generation device, and extreme-UV-light generation device

Extreme ultraviolet light generation apparatus

Target generation device and extreme ultraviolet light generation d...

Target storage device

Extreme ultraviolet light generation device

Target supply apparatus and EUV light generating apparatus

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus

Target supply device

Extreme ultraviolet light source apparatus

Chamber and extreme ultraviolet light generation apparatus

Target supply device

Target supply apparatus, chamber, and extreme ultraviolet light gen...

Target supply unit

Target supply device

Chamber apparatus and extreme ultraviolet light generation system

Extreme ultraviolet light generation system

Apparatus and method for measuring and controlling target trajector...

Extreme ultra violet light source apparatus

Excimer laser device

Discharge circuit for pulsed laser and pulsed power source

Once through fan for excimer laser apparatus

Laser gas controller and charging/discharging device for discharge-...

Patents Applicationslast 30 patents

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...

EUV CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM,...

MOUNT, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND DEVICE MANU...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

TARGET GENERATION DEVICE REPLACEMENT TROLLEY, TARGET GENERATION DEV...

TARGET GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION D...

TANK, TARGET GENERATION DEVICE, AND EXTREME-UV-LIGHT GENERATION DEVICE

TARGET STORAGE DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

TARGET SUPPLY APPARATUS AND EUV LIGHT GENERATING APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

TARGET SUPPLY DEVICE

CHAMBER AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

TARGET SUPPLY DEVICE

TARGET SUPPLY DEVICE

TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...

TARGET SUPPLY UNIT

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

Extreme ultra violet light source apparatus