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Toshihiro Tachikawa

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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of manufacturing ceramic sintered body, ceramic sintered bod...
    • Patent number 10,462,850
    • Issue date Oct 29, 2019
    • NHK Spring Co., Ltd.
    • Satoshi Hirano
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Grant

    Substrate support device
    • Patent number 10,276,410
    • Issue date Apr 30, 2019
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Shaft-equipped heater unit and method for manufacturing shaft-equip...
    • Patent number 9,414,441
    • Issue date Aug 9, 2016
    • NHK Spring Co., Ltd.
    • Gou Takahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate supporting apparatus
    • Patent number RE43837
    • Issue date Dec 4, 2012
    • NHK Spring Co., Ltd.
    • Naoya Kida
    • 118 - Coating apparatus
  • Information Patent Grant

    Electrostatic chucking stage and substrate processing apparatus
    • Patent number RE42175
    • Issue date Mar 1, 2011
    • Canon Anelva Corporation
    • Yasumi Sago
    • 118 - Coating apparatus
  • Information Patent Grant

    Heater unit
    • Patent number 7,851,728
    • Issue date Dec 14, 2010
    • NHK Spring Co., Ltd.
    • Jun Futakuchiya
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Substrate supporting apparatus
    • Patent number 7,503,980
    • Issue date Mar 17, 2009
    • NHK Spring Co., Ltd.
    • Naoya Kida
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Ceramics heater
    • Patent number 7,372,001
    • Issue date May 13, 2008
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Apparatus for vapor deposition
    • Patent number 7,241,346
    • Issue date Jul 10, 2007
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic chucking stage and substrate processing apparatus
    • Patent number 7,220,319
    • Issue date May 22, 2007
    • Canon Anelva Corporation
    • Yasumi Sago
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Heater unit
    • Patent number 7,045,747
    • Issue date May 16, 2006
    • NHK Spring Co., Ltd.
    • Jun Futakuchiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating apparatus
    • Patent number 6,376,808
    • Issue date Apr 23, 2002
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coil spring device
    • Patent number 5,092,568
    • Issue date Mar 3, 1992
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • B60 - VEHICLES IN GENERAL

Patents Applicationslast 30 patents

  • Information Patent Application

    SHAFT-EQUIPPED HEATER UNIT AND METHOD FOR MANUFACTURING SHAFT-EQUIP...
    • Publication number 20140083995
    • Publication date Mar 27, 2014
    • NHK Spring Co., Ltd.
    • Gou Takahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING CERAMIC SINTERED BODY, CERAMIC SINTERED BOD...
    • Publication number 20130200067
    • Publication date Aug 8, 2013
    • NHK Spring Co., Ltd.
    • Satoshi Hirano
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Application

    SUBSTRATE SUPPORT DEVICE
    • Publication number 20130134148
    • Publication date May 30, 2013
    • NHK Spring Co., Ltd.
    • Toshihiro TACHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Heater unit
    • Publication number 20080006618
    • Publication date Jan 10, 2008
    • NHK Spring Co., Ltd.
    • Jun Futakuchiya
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate supporting apparatus and manufacturing method therefor
    • Publication number 20070157466
    • Publication date Jul 12, 2007
    • NHK Spring Co., Ltd.
    • Naoya Kida
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Device for heating or cooling workpieces and manufacturing method t...
    • Publication number 20060081601
    • Publication date Apr 20, 2006
    • NHK Spring Co., Ltd.
    • Jun Futakuchiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Heater unit
    • Publication number 20050167421
    • Publication date Aug 4, 2005
    • NHK Spring Co., Ltd.
    • Jun Futakuchiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Apparatus for vapor deposition
    • Publication number 20040194710
    • Publication date Oct 7, 2004
    • NHK SPRING CO., LTD
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Ceramics heater
    • Publication number 20040112888
    • Publication date Jun 17, 2004
    • NHK SPRING CO., LTD
    • Toshihiro Tachikawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Electrostatic chucking stage and substrate processing apparatus
    • Publication number 20030222416
    • Publication date Dec 4, 2003
    • Yasumi Sago
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    Heating apparatus
    • Publication number 20010042744
    • Publication date Nov 22, 2001
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ceramic heater device and film forming device using the same
    • Publication number 20010029895
    • Publication date Oct 18, 2001
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...