Toshihiro Terasawa

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Chigasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion source, ion implantation apparatus, and ion source operating me...
- Patent number 10,910,192
- Issue date Feb 2, 2021
- ULVAC, Inc.
- Akio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and ion implantation apparatus
- Patent number 10,529,532
- Issue date Jan 7, 2020
- Ulvac, Inc.
- Takumi Yuze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anode-cathode structure for ion pump having specifically determined...
- Patent number 5,980,212
- Issue date Nov 9, 1999
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Guo Hua Shen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION SOURCE, ION IMPLANTATION APPARATUS, AND ION SOURCE OPERATING ME...
- Publication number 20200402759
- Publication date Dec 24, 2020
- ULVAC, Inc.
- Akio HIGASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCE AND ION IMPLANTATION APPARATUS
- Publication number 20190237290
- Publication date Aug 1, 2019
- ULVAC, Inc.
- Takumi YUZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IRRADIATION DEVICE AND ION IRRADIATION METHOD
- Publication number 20160013011
- Publication date Jan 14, 2016
- ULVAC, Inc.
- Takumi YUZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition apparatus and deposition method
- Publication number 20080011602
- Publication date Jan 17, 2008
- Seiko Epson Corporation & ULVAC, Inc.
- Hidenobu Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...