Toshihiro TOJO

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Inductively-coupled plasma processing apparatus
- Patent number 12,154,760
- Issue date Nov 26, 2024
- Tokyo Electron Limited
- Hitoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma processing apparatus
- Patent number 9,543,121
- Issue date Jan 10, 2017
- Tokyo Electron Limited
- Kazuo Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA, INDUCTIVELY COUPLED PL...
- Publication number 20230268160
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Toshihiro TOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively-Coupled Plasma Processing Apparatus
- Publication number 20200227236
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Hitoshi SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA, INDUCTIVELY COUPLED PL...
- Publication number 20130200043
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Toshihiro TOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
- Publication number 20120267051
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Kazuo SASAKI
- H01 - BASIC ELECTRIC ELEMENTS