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Toshihiro Wada
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Osaka, JP
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last 30 patents
Information
Patent Grant
Plasma processing apparatus and method for using plasma processing...
Patent number
12,165,845
Issue date
Dec 10, 2024
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,881,380
Issue date
Jan 23, 2024
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Toshihiro Wada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,398,372
Issue date
Jul 26, 2022
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma treatment method and method of manufacturing electronic comp...
Patent number
9,779,986
Issue date
Oct 3, 2017
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Atsushi Harikai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,673,166
Issue date
Mar 18, 2014
Panasonic Corporation
Shogo Okita
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240014008
Publication date
Jan 11, 2024
Panasonic Intellectual Property Management Co., Ltd.
Naoaki TAKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR USING PLASMA PROCESSING...
Publication number
20230170186
Publication date
Jun 1, 2023
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo OKITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220122809
Publication date
Apr 21, 2022
Panasonic Intellectual Property Management Co., Ltd.
Toshihiro WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT METHOD AND METHOD OF MANUFACTURING ELECTRONIC COMP...
Publication number
20170069536
Publication date
Mar 9, 2017
Panasonic Intellectual Property Management Co., Ltd.
ATSUSHI HARIKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20160064188
Publication date
Mar 3, 2016
Panasonic Intellectual Property Management Co., Ltd.
Shogo OKITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20110111601
Publication date
May 12, 2011
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS