Toshihiro Yamashita

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing system in which wafer is retained by electrostati...
- Patent number 7,137,352
- Issue date Nov 21, 2006
- Renesas Technology Corp.
- Toshihiro Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyor, method for conveying a semiconductor wafer, and method fo...
- Patent number 6,648,128
- Issue date Nov 18, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Toshihiro Yamashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Conveyor, method for conveying a semiconductor wafer, and method fo...
- Publication number 20030042115
- Publication date Mar 6, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Toshihiro Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing system in which wafer is retained by electrostati...
- Publication number 20020086546
- Publication date Jul 4, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Toshihiro Yamashita
- H01 - BASIC ELECTRIC ELEMENTS