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Hyogo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma etching apparatus
Patent number
10,224,220
Issue date
Mar 5, 2019
Tokyo Electron Limited
Toshihisa Ozu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etching apparatus
Patent number
8,980,048
Issue date
Mar 17, 2015
Tokyo Electron Limited
Tetsuya Nishizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus, plasma etching method, and semiconductor...
Patent number
8,969,210
Issue date
Mar 3, 2015
Tokyo Electron Limited
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and device
Patent number
8,835,320
Issue date
Sep 16, 2014
Tokyo Electron Limited
Toshihisa Ozu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma treatment device and plasma treatment method
Patent number
8,771,537
Issue date
Jul 8, 2014
Tokyo Electron Limited
Toshihisa Ozu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
8,753,527
Issue date
Jun 17, 2014
Tokyo Electron Limited
Tetsuya Nishizuka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DETECTION METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240030012
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Naoki MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEASONING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240030014
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Yusuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA ETCHING APPARATUS
Publication number
20140262025
Publication date
Sep 18, 2014
TOKYO ELECTRON LIMITED
Toshihisa Ozu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS
Publication number
20140231017
Publication date
Aug 21, 2014
TOKYO ELECTRON LIMITED
Tetsuya Nishizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND DEVICE
Publication number
20130102157
Publication date
Apr 25, 2013
TOKYO ELECTRON LIMITED
Toshihisa Ozu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD
Publication number
20130071955
Publication date
Mar 21, 2013
TOKYO ELECTRON LIMITED
Hiroki Kintaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT DEVICE AND PLASMA TREATMENT METHOD
Publication number
20120190208
Publication date
Jul 26, 2012
TOKYO ELECTRON LIMITED
Toshihisa Ozu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR...
Publication number
20120064726
Publication date
Mar 15, 2012
TOKYO ELECTRON LIMITED
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20110266257
Publication date
Nov 3, 2011
TOKYO ELECTRON LIMITED
Tetsuya Nishizuka
H01 - BASIC ELECTRIC ELEMENTS