Toshihisa Ozu

Follow

Person

Hwaseong-City, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Method for processing base body to be processed
- Patent number 9,728,417
- Issue date Aug 8, 2017
- Tokyo Electron Limited
- Masaki Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching organic film
- Patent number 9,711,371
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist mask processing method using hydrogen containing plasma
- Patent number 9,337,020
- Issue date May 10, 2016
- Tokyo Electron Limited
- Michihisa Takachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,034,698
- Issue date May 19, 2015
- Tokyo Electron Limited
- Toshihisa Ozu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ETCHING ORGANIC FILM
- Publication number 20160126071
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST MASK PROCESSING METHOD
- Publication number 20150104957
- Publication date Apr 16, 2015
- TOKYO ELECTRON LIMITED
- Michihisa Takachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150096882
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20150056773
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Toshihisa Ozu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING BASE BODY TO BE PROCESSED
- Publication number 20150017811
- Publication date Jan 15, 2015
- Masaki Inoue
- H01 - BASIC ELECTRIC ELEMENTS