Toshikazu Akimoto

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Tokyo, JP

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Patents Applicationslast 30 patents

Information Patent Application
LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND LIQU...
- Publication number 20240420970
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Takao OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE, GAS SHOWER HEAD, AND METHOD FOR...
- Publication number 20230094546
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150004721
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Toshikazu Akimoto
- H01 - BASIC ELECTRIC ELEMENTS