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Toshikazu Arihisa
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Kurume, JP
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last 30 patents
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Patent Grant
Apparatus for cleaning both sides of substrate
Patent number
6,276,378
Issue date
Aug 21, 2001
Tokyo Electron Limited
Hiroki Taniyama
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus for cleaning both sides of substrate
Patent number
6,115,867
Issue date
Sep 12, 2000
Tokyo Electron Limited
Satoshi Nakashima
H01 - BASIC ELECTRIC ELEMENTS