Toshikazu Kawahara

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Recipe creation device for use in semiconductor measurement device...
- Patent number 10,984,143
- Issue date Apr 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Hiromi Fujita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Global alignment using multiple alignment pattern candidates
- Patent number 9,057,873
- Issue date Jun 16, 2015
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G02 - OPTICS
Information Patent Grant
Recipe generation system and method
- Patent number 8,189,040
- Issue date May 29, 2012
- Hitachi High-Technologies Corporation
- Hiromi Fujita
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Recipe Creation Device for Use in Semiconductor Measurement Device...
- Publication number 20170371981
- Publication date Dec 28, 2017
- Hitachi High-Technologies Corporation
- Hiromi FUJITA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Template Creation Device for Sample Observation Device, and Sample...
- Publication number 20160140287
- Publication date May 19, 2016
- Hitachi High-Technologies Corporation
- Yuki OJIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN EVALUATION DEVICE AND PATTERN EVALUATION METHOD
- Publication number 20150146967
- Publication date May 28, 2015
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G02 - OPTICS
Information Patent Application
GLOBAL ALIGNMENT USING MULTIPLE ALIGNMENT PATTERN CANDIDATES
- Publication number 20130234019
- Publication date Sep 12, 2013
- Atsushi Miyamoto
- G02 - OPTICS
Information Patent Application
Recipe Generation System and Method
- Publication number 20090062934
- Publication date Mar 5, 2009
- Hitachi High-Technologies Corporation
- Hiromi FUJITA
- G05 - CONTROLLING REGULATING