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Toshikazu NAKAZAWA

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  • Kawasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering apparatus and substrate processing apparatus
    • Patent number 10,615,012
    • Issue date Apr 7, 2020
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus and substrate processing apparatus
    • Patent number 10,062,551
    • Issue date Aug 28, 2018
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus and substrate processing apparatus
    • Patent number 9,997,339
    • Issue date Jun 12, 2018
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,822,450
    • Issue date Nov 21, 2017
    • Canon Anelva Corporation
    • Toshikazu Nakazawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate heat treatment apparatus
    • Patent number 9,607,868
    • Issue date Mar 28, 2017
    • Canon Anelva Corporation
    • Takuji Okada
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,245,785
    • Issue date Jan 26, 2016
    • Canon Anelva Corporation
    • Yukihito Tashiro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Thin film forming apparatus, thin film forming method, and shield c...
    • Patent number 9,194,038
    • Issue date Nov 24, 2015
    • Canon Anelva Corporation
    • Akihiro Egami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,127,355
    • Issue date Sep 8, 2015
    • Canon Anelva Corporation
    • Toshikazu Nakazawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,085,820
    • Issue date Jul 21, 2015
    • Canon Anelva Corporation
    • Toshikazu Nakazawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents