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Toshikazu Nomura
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Tokyo, JP
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last 30 patents
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Patent Application
FILM-THICKNESS MEASURING APPARATUS, FILM-THICKNESS MEASURING METHOD...
Publication number
20150017880
Publication date
Jan 15, 2015
EBARA CORPORATION
Toshikazu NOMURA
G01 - MEASURING TESTING
Information
Patent Application
POLISHING METHOD
Publication number
20140030826
Publication date
Jan 30, 2014
Shinrou Ohta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR POLISHING A WORKPIECE
Publication number
20090142990
Publication date
Jun 4, 2009
Tatsuya Kohama
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and polishing method
Publication number
20060105678
Publication date
May 18, 2006
Tatsuya Kohama
B24 - GRINDING POLISHING
Information
Patent Application
Substrate processing method and apparatus
Publication number
20050191858
Publication date
Sep 1, 2005
Akira Fukunaga
B24 - GRINDING POLISHING