Toshiki HINATA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus
- Patent number 11,761,075
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Yukimasa Saito
- B08 - CLEANING
Information Patent Grant
Method for cleaning chamber of substrate processing apparatus
- Patent number 10,786,837
- Issue date Sep 29, 2020
- Tokyo Electron Limited
- Yukimasa Saito
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,096,495
- Issue date Oct 9, 2018
- Tokyo Electron Limited
- Manabu Amikura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190006207
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Manabu AMIKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CLEANING CHAMBER OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20180369881
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Yukimasa SAITO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS
- Publication number 20180355465
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Yukimasa SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160189987
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Manabu AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS