Toshiki Hosaka

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Kofu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 7,201,851
- Issue date Apr 10, 2007
- Tokyo Electron Limited
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 6,990,747
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Vacuum processing apparatus and substrate transfer method
- Publication number 20060032074
- Publication date Feb 16, 2006
- TOKYO ELECTRON LIMITED
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus and substrate transfer method
- Publication number 20040255485
- Publication date Dec 23, 2004
- TOKYO ELECTRON LIMITED
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS