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Toshiki NAKAJIMA

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  • Miyagi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20240049379
    • Publication date Feb 8, 2024
    • TOKYO ELECTRON LIMITED
    • Yohei YAMAZAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230021588
    • Publication date Jan 26, 2023
    • TOKYO ELECTRON LIMITED
    • Yohei YAMAZAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANTENNA FOR INDUCTIVELY COUPLED PLASMA EXCITATION, ANTENNA UNIT FOR...
    • Publication number 20220270851
    • Publication date Aug 25, 2022
    • TOKYO ELECTRON LIMITED
    • Takehisa SAITO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210375597
    • Publication date Dec 2, 2021
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210320009
    • Publication date Oct 14, 2021
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20200266034
    • Publication date Aug 20, 2020
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190131136
    • Publication date May 2, 2019
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190098740
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Yohei YAMAZAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    TEMPERATURE CONTROL DEVICE FOR PROCESSING TARGET OBJECT AND METHOD...
    • Publication number 20170301579
    • Publication date Oct 19, 2017
    • TOKYO ELECTRON LIMITED
    • Yuki Hosaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS SUPPLY MECHANISM AND SEMICONDUCTOR MANUFACTURING SYSTEM
    • Publication number 20170301568
    • Publication date Oct 19, 2017
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20170092513
    • Publication date Mar 30, 2017
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20160260582
    • Publication date Sep 8, 2016
    • TOKYO ELECTRON LIMITED
    • Yuki HOSAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...