Toshikuni Shimizu

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Ayase-city, JP

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Patents Grantslast 30 patents

Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,012,964
- Issue date Jan 11, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Washing apparatus for disc-like workpieces
- Patent number 5,810,028
- Issue date Sep 22, 1998
- Speedfam Co., Ltd.
- Masahiro Ichikawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Carrier for holding an object to be polished
- Publication number 20090203300
- Publication date Aug 13, 2009
- SpeedFam Co., Ltd.
- Akira Yoshida
- B24 - GRINDING POLISHING
Information Patent Application
Carrier for holding an object to be polished
- Publication number 20050202758
- Publication date Sep 15, 2005
- Akira Yoshida
- B24 - GRINDING POLISHING