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Toshimasa KOBAYASHI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,756,774
    • Issue date Sep 12, 2023
    • Tokyo Electron Limited
    • Toshimasa Kobayashi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230386804
    • Publication date Nov 30, 2023
    • TOKYO ELECTRON LIMITED
    • Toshimasa KOBAYASHI
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210043434
    • Publication date Feb 11, 2021
    • TOKYO ELECTRON LIMITED
    • Toshimasa KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STRUCTURE FOR SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200194238
    • Publication date Jun 18, 2020
    • TOKYO ELECTRON LIMITED
    • Daisuke ITO
    • H01 - BASIC ELECTRIC ELEMENTS