Toshimasa Shimoda

Person

Ageo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of making a static pressure air bearing
- Patent number 6,735,867
- Issue date May 18, 2004
- Nikon Corporation
- Takuma Tsuda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Static pressure air bearing
- Patent number 6,499,880
- Issue date Dec 31, 2002
- Nikon Corporation
- Takuma Tsuda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Static air-bearing and stage apparatus using the bearing and optica...
- Patent number 6,328,473
- Issue date Dec 11, 2001
- Nikon Corporation
- Shinobu Tokushima
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
CONTROL DEVICE, CONTROL METHOD, AND PROGRAM
- Publication number 20230052396
- Publication date Feb 16, 2023
- Nikon Corporation
- Hidehiro MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus, manufacturing method and supporting method thereof
- Publication number 20090190117
- Publication date Jul 30, 2009
- Nikon Corporation
- Kazuya Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, manufacturing method thereof, and maintenance m...
- Publication number 20090147228
- Publication date Jun 11, 2009
- Nikon Corporation
- Kazuya Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Vacuum chamber having instrument-mounting bulkhead exhibiting reduc...
- Publication number 20040169832
- Publication date Sep 2, 2004
- NIKON CORPORATION
- Toshimasa Shimoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Vacuum chamber having instrument- mounting bulkhead exhibiting redu...
- Publication number 20030043357
- Publication date Mar 6, 2003
- Nikon Corporatoin
- Toshimasa Shimoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Static pressure air bearing
- Publication number 20020181808
- Publication date Dec 5, 2002
- Nikon Corporation
- Takuma Tsuda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Static pressure air bearing
- Publication number 20020034345
- Publication date Mar 21, 2002
- Nikon Corporation
- Takuma Tsuda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Toshimasa Shimoda

Person

Patents Grantslast 30 patents

Method of making a static pressure air bearing

Static pressure air bearing

Static air-bearing and stage apparatus using the bearing and optica...

Patents Applicationslast 30 patents

CONTROL DEVICE, CONTROL METHOD, AND PROGRAM

Exposure apparatus, manufacturing method and supporting method thereof

Exposure apparatus, manufacturing method thereof, and maintenance m...

Vacuum chamber having instrument-mounting bulkhead exhibiting reduc...

Vacuum chamber having instrument- mounting bulkhead exhibiting redu...

Static pressure air bearing

Static pressure air bearing