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Toshimitsu Funayoshi
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Kyoto, JP
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last 30 patents
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Patent Grant
Thermal processing apparatus and thermal processing method
Patent number
7,038,173
Issue date
May 2, 2006
Dainippon Screen Mfg. Co., Ltd.
Mitsukazu Takahashi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Thermal processing apparatus and thermal processing method
Publication number
20030146200
Publication date
Aug 7, 2003
Dainippon Screen Mfg. Co., Ltd.
Mitsukazu Takahashi
C30 - CRYSTAL GROWTH