Toshimitsu Kawasa

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Atsugi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Encoder for controlling measurements in the range of a few angstroms
- Patent number 5,519,686
- Issue date May 21, 1996
- Canon Kabushiki Kaisha
- Yoshihiro Yanagisawa
- B82 - NANO-TECHNOLOGY