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Vapor deposition apparatus
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Patent number 5,205,870
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Issue date Apr 27, 1993
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Kabushiki Kaisha Toshiba
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Yuusuke Sato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vapor deposition apparatus
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Patent number 5,151,133
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Issue date Sep 29, 1992
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Kabushiki Kaisha Toshiba
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Toshimitsu Ohmine
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vapor deposition system
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Patent number 5,088,444
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Issue date Feb 18, 1992
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Kabushiki Kaisha Toshiba
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Toshimitsu Ohmine
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vapor deposition apparatus
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Patent number 5,002,011
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Issue date Mar 26, 1991
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Kabushiki Kaisha Toshiba
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Toshimitsu Ohmine
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Exhaust processing apparatus
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Patent number 4,940,213
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Issue date Jul 10, 1990
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Kabushiki Kaisha Toshiba
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Toshimitsu Ohmine
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL