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Tokyo, JP
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last 30 patents
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Patent Grant
Coated film forming apparatus
Patent number
6,383,294
Issue date
May 7, 2002
Kabushiki Kaisha Toshiba
Yoshiaki Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
6,368,977
Issue date
Apr 9, 2002
Kabushiki Kaisha Toshiba
Masaki Narita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method using electrostatic chuck...
Patent number
6,333,246
Issue date
Dec 25, 2001
Kabushiki Kaisha Toshiba
Masaki Narita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...