Toshimitsu SAKAI

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,557,493
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Toshimitsu Sakai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210159096
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Toshimitsu SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20190096702
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Toshimitsu SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...