Toshimitsu Uehigashi

Follow

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming NiSi film, method for forming silicide film, met...
- Patent number 8,815,737
- Issue date Aug 26, 2014
- ULVAC, Inc.
- Yasushi Higuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming Ni film
- Patent number 8,669,191
- Issue date Mar 11, 2014
- ULVAC, Inc.
- Toshimitsu Uehigashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering device
- Patent number 6,413,392
- Issue date Jul 2, 2002
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Tsuyoshi Sahoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING NI FILM
- Publication number 20120264310
- Publication date Oct 18, 2012
- Ulvac, Inc.
- Toshimitsu Uehigashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING NISI FILM, METHOD FOR FORMING SILICIDE FILM, MET...
- Publication number 20120244701
- Publication date Sep 27, 2012
- Ulvac, Inc.
- Yasushi Higuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...