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Toshimitsu Uehigashi
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Shizuoka, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for forming NiSi film, method for forming silicide film, met...
Patent number
8,815,737
Issue date
Aug 26, 2014
ULVAC, Inc.
Yasushi Higuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming Ni film
Patent number
8,669,191
Issue date
Mar 11, 2014
ULVAC, Inc.
Toshimitsu Uehigashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering device
Patent number
6,413,392
Issue date
Jul 2, 2002
Nihon Shinku Gijutsu Kabushiki Kaisha
Tsuyoshi Sahoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING NI FILM
Publication number
20120264310
Publication date
Oct 18, 2012
Ulvac, Inc.
Toshimitsu Uehigashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING NISI FILM, METHOD FOR FORMING SILICIDE FILM, MET...
Publication number
20120244701
Publication date
Sep 27, 2012
Ulvac, Inc.
Yasushi Higuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...