Toshinari MURAI

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Joetsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer polishing method and polished wafer
- Patent number 7,588,481
- Issue date Sep 15, 2009
- Shin-Etsu Chemical Co., Ltd.
- Toshinari Murai
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
WAFER POLISHING METHOD AND POLISHED WAFER
- Publication number 20070045232
- Publication date Mar 1, 2007
- Shin-Etsu Chemical Co., Ltd.
- Toshinari MURAI
- B24 - GRINDING POLISHING