Toshinari Takata

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Chigasaki, JP

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Patents Grantslast 30 patents

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Plasma ashing method and apparatus therefor
- Patent number 5,226,056
- Issue date Jul 6, 1993
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Masashi Kikuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY