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Toshinobu Furusho
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Kumamoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Treatment solution supply apparatus and treatment solution supply m...
Patent number
11,099,480
Issue date
Aug 24, 2021
Tokyo Electron Limited
Takahiro Ookubo
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
10,734,251
Issue date
Aug 4, 2020
Tokyo Electron Limited
Koji Takayanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing liquid supplying apparatus and method of supplying proce...
Patent number
10,268,116
Issue date
Apr 23, 2019
Tokyo Electron Limited
Kousuke Yoshihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemical supply system, substrate treatment apparatus incorporating...
Patent number
10,035,173
Issue date
Jul 31, 2018
Tokyo Electron Limited
Toshinobu Furusho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solution treatment apparatus and solution treatment method
Patent number
10,022,652
Issue date
Jul 17, 2018
Tokyo Electron Limited
Kousuke Yoshihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing liquid supply method, processing liquid supply apparatus...
Patent number
9,975,073
Issue date
May 22, 2018
Tokyo Electron Limited
Yuichi Yoshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Solution treatment apparatus and solution treatment method
Patent number
9,878,267
Issue date
Jan 30, 2018
Tokyo Electron Limited
Kousuke Yoshihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing liquid supplying apparatus and method of supplying proce...
Patent number
9,846,363
Issue date
Dec 19, 2017
Tokyo Electron Limited
Kousuke Yoshihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Solution treatment apparatus and solution treatment method
Patent number
9,731,226
Issue date
Aug 15, 2017
Tokyo Electron Limited
Kousuke Yoshihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing-liquid supply apparatus and processing-liquid supply method
Patent number
9,732,910
Issue date
Aug 15, 2017
Tokyo Electron Limited
Koji Takayanagi
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Chemical liquid supply method and chemical liquid supply system
Patent number
9,372,405
Issue date
Jun 21, 2016
Tokyo Electron Limited
Toshinobu Furusho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing liquid supply method, processing liquid supply apparatus...
Patent number
9,162,163
Issue date
Oct 20, 2015
Tokyo Electron Limited
Yuichi Yoshida
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Grant
Chemical supply system, substrate treatment apparatus incorporating...
Patent number
9,086,190
Issue date
Jul 21, 2015
Tokyo Electron Limited
Toshinobu Furusho
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Process liquid supply mechanism and process liquid supply method
Patent number
6,848,625
Issue date
Feb 1, 2005
Tokyo Electron Limited
Takashi Takekuma
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS AND TREATMENT SOLUTION SUPPLY M...
Publication number
20190332014
Publication date
Oct 31, 2019
TOKYO ELECTRON LIMITED
Takahiro OOKUBO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
Publication number
20180093205
Publication date
Apr 5, 2018
TOKYO ELECTRON LIMITED
Kousuke YOSHIHARA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...
Publication number
20180074407
Publication date
Mar 15, 2018
TOKYO ELECTRON LIMITED
Kousuke YOSHIHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
Publication number
20170296944
Publication date
Oct 19, 2017
TOKYO ELECTRON LIMITED
Kousuke YOSHIHARA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PROCESSING LIQUID SUPPLY METHOD, PROCESSING LIQUID SUPPLY APPARATUS...
Publication number
20150367266
Publication date
Dec 24, 2015
TOKYO ELECTRON LIMITED
Yuichi Yoshida
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING...
Publication number
20150279702
Publication date
Oct 1, 2015
TOKYO ELECTRON LIMITED
Toshinobu FURUSHO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...
Publication number
20150125793
Publication date
May 7, 2015
TOKYO ELECTRON LIMITED
Kousuke YOSHIHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD
Publication number
20150090340
Publication date
Apr 2, 2015
TOKYO ELECTRON LIMITED
Koji Takayanagi
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...
Publication number
20150092167
Publication date
Apr 2, 2015
TOKYO ELECTRON LIMITED
Yuichi Terashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
Publication number
20150000517
Publication date
Jan 1, 2015
TOKYO ELECTRON LIMITED
Kousuke Yoshihara
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20140174475
Publication date
Jun 26, 2014
TOKYO ELECTRON LIMITED
Koji TAKAYANAGI
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
PROCESSING LIQUID SUPPLY METHOD, PROCESSING LIQUID SUPPLY APPARATUS...
Publication number
20140097147
Publication date
Apr 10, 2014
TOKYO ELECTRON LIMITED
Yuichi Yoshida
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
TREATMENT SOLUTION SUPPLY METHOD, NON-TRANSITORY COMPUTER STORAGE M...
Publication number
20130112628
Publication date
May 9, 2013
TOKYO ELECTRON LIMITED
Kousuke Yoshihara
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING...
Publication number
20130068324
Publication date
Mar 21, 2013
TOKYO ELECTRON LIMITED
Toshinobu Furusho
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CHEMICAL LIQUID SUPPLY METHOD AND CHEMICAL LIQUID SUPPLY SYSTEM
Publication number
20120181239
Publication date
Jul 19, 2012
TOKYO ELECTRON LIMITED
Toshinobu Furusho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process liquid supply mechanism and process liquid supply method
Publication number
20030180471
Publication date
Sep 25, 2003
TOKYO ELECTRON LIMITED
Takashi Takekuma
H01 - BASIC ELECTRIC ELEMENTS