Toshinori Debari

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and residue removal method
- Patent number 10,818,506
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Noriyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20240006187
- Publication date Jan 4, 2024
- Tokyo Electron Limited
- Toshinori DEBARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND RESIDUE REMOVAL METHOD
- Publication number 20190013207
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Noriyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA NITRIDING METHOD
- Publication number 20130022760
- Publication date Jan 24, 2013
- TOKYO ELECTRON LIMITED
- Toshinori Debari
- H01 - BASIC ELECTRIC ELEMENTS