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Toshio Ajito
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Fukushima-ken, JP
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last 30 patents
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Patent Grant
Method of purifying alkaline solution and method of etching semicon...
Patent number
6,319,845
Issue date
Nov 20, 2001
Shin-Etsu Handotai Co., Ltd.
Isao Uchiyama
C01 - INORGANIC CHEMISTRY
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Patent Grant
Method of purifying alkaline solution and method of etching semicon...
Patent number
6,110,839
Issue date
Aug 29, 2000
Shin-Etsu Handotai Co., Ltd.
Masami Nakano
C01 - INORGANIC CHEMISTRY