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Toshio Ando
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Tokyo, JP
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last 30 patents
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Patent Grant
Method of fabricating in-situ doped rough polycrystalline silicon u...
Patent number
6,194,292
Issue date
Feb 27, 2001
Texas Instruments Incorporated
Robert Yung-Hsi Tsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Substrate processing apparatus
Publication number
20030140853
Publication date
Jul 31, 2003
Hitachi Kokusai Electric Inc.
Tetsuya Wada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...