Toshio Haga

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Control method and plasma processing apparatus
- Patent number 11,037,761
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Toshio Haga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching layer to be etched
- Patent number 10,347,499
- Issue date Jul 9, 2019
- Tokyo Electron Limited
- Koji Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,991,096
- Issue date Jun 5, 2018
- Tokyo Electron Limited
- Toshio Haga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 9,502,219
- Issue date Nov 22, 2016
- Tokyo Electron Limited
- Yoshihide Kihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method, plasma etching apparatus and storage medium
- Patent number 8,383,001
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Hiromasa Mochiki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200185195
- Publication date Jun 11, 2020
- TOKYO ELECTRON LIMITED
- Toshio HAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING LAYER TO BE ETCHED
- Publication number 20180144948
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Koji MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20150262794
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Yoshihide Kihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150027637
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Toshio HAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND STORAGE MEDIUM
- Publication number 20100213162
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Hiromasa Mochiki
- H01 - BASIC ELECTRIC ELEMENTS