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Toshio Hasegawa

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD AND APPARATUS FOR EMBEDDING RUTHENIUM IN RECESS FORMED ON SU...
    • Publication number 20240360547
    • Publication date Oct 31, 2024
    • TOKYO ELECTRON LIMITED
    • Tadahiro ISHIZAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD AND PROCESSING DEVICE
    • Publication number 20240191359
    • Publication date Jun 13, 2024
    • Tokyo Electron Limited
    • Toshio HASEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20230399737
    • Publication date Dec 14, 2023
    • TOKYO ELECTRON LIMITED
    • Yoshihiro KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20230392258
    • Publication date Dec 7, 2023
    • Tokyo Electron Limited
    • Toshio HASEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILLING METHOD AND FILM FORMING APPARATUS
    • Publication number 20230374656
    • Publication date Nov 23, 2023
    • Tokyo Electron Limited
    • Toshio HASEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20230357923
    • Publication date Nov 9, 2023
    • Tokyo Electron Limited
    • Kouji SHIMOMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Extreme Ultraviolet Lithography Patterning Method
    • Publication number 20230054125
    • Publication date Feb 23, 2023
    • TOKYO ELECTRON LIMITED
    • Choong-man Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
    • Publication number 20220301882
    • Publication date Sep 22, 2022
    • TOKYO ELECTRON LIMITED
    • Koichi TAKATSUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Processing Method
    • Publication number 20210142982
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Shinya IWASHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ABNORMALITY DETECTION SYSTEM AND CONTROL BOARD
    • Publication number 20200299841
    • Publication date Sep 24, 2020
    • TOKYO ELECTRON LIMITED
    • Katsuhito Hirose
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of Forming RuSi Film and Film and Film-Forming Apparatus
    • Publication number 20200208260
    • Publication date Jul 2, 2020
    • TOKYO ELECTRON LIMITED
    • Takamichi KIKUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
    • Publication number 20200111675
    • Publication date Apr 9, 2020
    • TOKYO ELECTRON LIMITED
    • Koichi TAKATSUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20190088475
    • Publication date Mar 21, 2019
    • TOKYO ELECTRON LIMITED
    • Shinya Iwashita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS...
    • Publication number 20180108518
    • Publication date Apr 19, 2018
    • TOKYO ELECTRON LIMITED
    • Naotaka Noro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING TITANIUM OXIDE FILM AND METHOD OF FORMING HARD MASK
    • Publication number 20180108534
    • Publication date Apr 19, 2018
    • TOKYO ELECTRON LIMITED
    • Naoki SHINDO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING SYSTEM
    • Publication number 20180076087
    • Publication date Mar 15, 2018
    • Susumu YAMAUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CMOS Vt CONTROL INTEGRATION BY MODIFICATION OF METAL-CONTAINING GAT...
    • Publication number 20160111290
    • Publication date Apr 21, 2016
    • TOKYO ELECTRON LIMITED
    • Genji Nakamura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR FORMING COPPER WIRING
    • Publication number 20140175046
    • Publication date Jun 26, 2014
    • TOKYO ELECTRON LIMITED
    • Tadahiro ISHIZAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20100047472
    • Publication date Feb 25, 2010
    • TOKYO ELECTRON LIMITED
    • Toshio HASEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of film formation and computer-readable storage medium
    • Publication number 20090104352
    • Publication date Apr 23, 2009
    • TOKYO ELECTRON LIMITED
    • Toshio Hasegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Precoat film forming method, idling method of film forming device,...
    • Publication number 20080226822
    • Publication date Sep 18, 2008
    • Satoshi Wakabayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film-Forming Method
    • Publication number 20080226823
    • Publication date Sep 18, 2008
    • Toshio Hasegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for forming film
    • Publication number 20060193980
    • Publication date Aug 31, 2006
    • Toshio Hasegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Precoat film forming method
    • Publication number 20050221005
    • Publication date Oct 6, 2005
    • Satoshi Wakabayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Precoat film forming method, idling method of film forming device,...
    • Publication number 20050098109
    • Publication date May 12, 2005
    • TOKYO ELECTRON LIMITED
    • Satoshi Wakabayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film forming method
    • Publication number 20040235191
    • Publication date Nov 25, 2004
    • Toshio Hasegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Exhaust apparatus for process apparatus and method of removing impu...
    • Publication number 20040081607
    • Publication date Apr 29, 2004
    • TOKYO ELECTRON LIMITED
    • Toshio Hasegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Precoat film forming method
    • Publication number 20030235652
    • Publication date Dec 25, 2003
    • Satoshi Wakabayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Precoat film forming method, idling method of film forming device,...
    • Publication number 20030165620
    • Publication date Sep 4, 2003
    • Satoshi Wakabayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...