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Toshio Homma
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Ueda, JP
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last 30 patents
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Patent Grant
Method for production of silicon thin film piezoresistive devices
Patent number
4,657,775
Issue date
Apr 14, 1987
Kabushiki Kaisha Nagano Keiki Seisakusho
Hisanori Shioiri
H01 - BASIC ELECTRIC ELEMENTS