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Substrate support bushing
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Patent number 8,216,422
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Issue date Jul 10, 2012
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Applied Materials, Inc.
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Shinichi Kurita
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate support bushing
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Patent number 8,033,245
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Issue date Oct 11, 2011
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Applied Materials, Inc.
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Shinichi Kurita
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate support
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Patent number 7,735,710
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Issue date Jun 15, 2010
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Applied Materials, Inc.
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Shinichi Kurita
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate support
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Patent number 6,824,343
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Issue date Nov 30, 2004
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Applied Materials, Inc.
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Shinichi Kurita
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H01 - BASIC ELECTRIC ELEMENTS