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Toshio Kodama
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Chiba, JP
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Patents Grants
last 30 patents
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Patent Grant
Ion beam device and ion beam processing method, and holder member
Patent number
7,297,944
Issue date
Nov 20, 2007
SII NanoTechnology Inc.
Toshio Kodama
G01 - MEASURING TESTING
Information
Patent Grant
Ion beam device and ion beam processing method
Patent number
7,276,691
Issue date
Oct 2, 2007
SII NanoTechnology Inc.
Toshio Kodama
G01 - MEASURING TESTING
Information
Patent Grant
Ion beam apparatus, ion beam processing method and sample holder me...
Patent number
6,838,685
Issue date
Jan 4, 2005
SII NanoTechnology Inc.
Toshio Kodama
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring film thickness
Patent number
6,489,612
Issue date
Dec 3, 2002
Seiko Instruments Inc.
Toshio Kodama
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Ion beam device and ion beam processing method
Publication number
20060163497
Publication date
Jul 27, 2006
Toshio Kodama
G01 - MEASURING TESTING
Information
Patent Application
Ion beam device and ion beam processing method, and holder member
Publication number
20050236587
Publication date
Oct 27, 2005
Toshio Kodama
G01 - MEASURING TESTING