Toshio Komemura

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus capable of evaluating process performance
- Patent number 6,929,712
- Issue date Aug 16, 2005
- Renesas Technology Corp.
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspecting device for substrate to be processed and method o...
- Patent number 6,768,542
- Issue date Jul 27, 2004
- Renesas Technology Corp.
- Hirotoshi Ise
- G01 - MEASURING TESTING
Information Patent Grant
Conveyor, method for conveying a semiconductor wafer, and method fo...
- Patent number 6,648,128
- Issue date Nov 18, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Toshihiro Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Die bonding device and semiconductor device
- Patent number 6,347,655
- Issue date Feb 19, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Masahiko Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating apparatus with multiple microwave introducing means
- Patent number 6,109,208
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced microwave plasma generating apparatus
- Patent number 6,054,016
- Issue date Apr 25, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Mutumi Tuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma apparatus
- Patent number 5,679,204
- Issue date Oct 21, 1997
- Shikoku Instrumentation Co., Ltd.
- Masayuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer breaking apparatus
- Patent number 4,775,085
- Issue date Oct 4, 1988
- Mitsubishi Denki Kabushiki Kaisha
- Masahiro Ishizuka
- B28 - WORKING CEMENT, CLAY, OR STONE

Patents Applicationslast 30 patents

Information Patent Application
Device for examining end part
- Publication number 20050024630
- Publication date Feb 3, 2005
- RENESAS TECHNOLOGY CORP.
- Toshiki Ohno
- G01 - MEASURING TESTING
Information Patent Application
Plasma processing apparatus capable of evaluating process performance
- Publication number 20030178140
- Publication date Sep 25, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Defect inspecting device for substrate to be processed and method o...
- Publication number 20030053046
- Publication date Mar 20, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Hirotoshi Ise
- G01 - MEASURING TESTING
Information Patent Application
Conveyor, method for conveying a semiconductor wafer, and method fo...
- Publication number 20030042115
- Publication date Mar 6, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Toshihiro Yamashita
- H01 - BASIC ELECTRIC ELEMENTS

Toshio Komemura

Person

Patents Grantslast 30 patents

Plasma processing apparatus capable of evaluating process performance

Defect inspecting device for substrate to be processed and method o...

Conveyor, method for conveying a semiconductor wafer, and method fo...

Die bonding device and semiconductor device

Plasma generating apparatus with multiple microwave introducing means

Magnetically enhanced microwave plasma generating apparatus

Plasma apparatus

Semiconductor wafer breaking apparatus

Patents Applicationslast 30 patents

Device for examining end part

Plasma processing apparatus capable of evaluating process performance

Defect inspecting device for substrate to be processed and method o...

Conveyor, method for conveying a semiconductor wafer, and method fo...