Toshio Miyazawa

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus
- Patent number 9,725,804
- Issue date Aug 8, 2017
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and process status checking method
- Patent number 9,708,711
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and valve operation checking method
- Patent number 8,834,631
- Issue date Sep 16, 2014
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inspecting method and apparatus for semiconductor integrated circuit
- Patent number 6,037,793
- Issue date Mar 14, 2000
- Tokyo Electron Limited
- Toshio Miyazawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS
- Publication number 20160047039
- Publication date Feb 18, 2016
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESS STATUS CHECKING METHOD
- Publication number 20130186332
- Publication date Jul 25, 2013
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND VALVE OPERATION CHECKING METHOD
- Publication number 20130183443
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...