Toshio Onodera

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Aligner and self-cleaning method for aligner
- Patent number 7,733,460
- Issue date Jun 8, 2010
- Oki Semiconductor Co., Ltd.
- Ryoichi Aoyama
- B08 - CLEANING
Information Patent Grant
Self-cleaning method for semiconductor exposure apparatus
- Patent number 6,980,278
- Issue date Dec 27, 2005
- Oki Electric Industry Co., Ltd.
- Ryoichi Aoyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Aligner and self-cleaning method for aligner
- Publication number 20100208220
- Publication date Aug 19, 2010
- Oki Semiconductor Co., Ltd.
- Ryoichi Aoyama
- B08 - CLEANING
Information Patent Application
Aligner and self-cleaning method for aligner
- Publication number 20070240735
- Publication date Oct 18, 2007
- Ryoichi Aoyama
- B08 - CLEANING
Information Patent Application
Self-cleaning method for semiconductor exposure apparatus
- Publication number 20040239900
- Publication date Dec 2, 2004
- Ryoichi Aoyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY