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Sensor device and sensor
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Patent number 12,140,430
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Issue date Nov 12, 2024
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PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
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Hideki Ueda
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Sensor device
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Patent number 11,885,621
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Issue date Jan 30, 2024
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PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
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Koichiro Nakashima
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Angular velocity sensor
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Patent number 9,448,068
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Issue date Sep 20, 2016
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PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
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Takashi Uchida
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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