Toshio YOKOZUKA

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Oyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Laser apparatus, EUV light generation system, and method of control...
- Patent number 10,224,686
- Issue date Mar 5, 2019
- Gigaphoton Inc.
- Yasufumi Kawasuji
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LASER APPARATUS, EUV LIGHT GENERATION SYSTEM, AND METHOD OF CONTROL...
- Publication number 20170070024
- Publication date Mar 9, 2017
- Gigaphoton Inc.
- Yasufumi KAWASUJI
- H01 - BASIC ELECTRIC ELEMENTS