Toshio Yumiyama

Person

Ehime, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 10,217,607
- Issue date Feb 26, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and method of controlling the same
- Patent number 9,564,289
- Issue date Feb 7, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Tadanobu Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 9,379,030
- Issue date Jun 28, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Shiro Ninomiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 9,305,784
- Issue date Apr 5, 2016
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,772,741
- Issue date Jul 8, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation system and ion beam irradiation method
- Patent number 8,735,855
- Issue date May 27, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and control method thereof
- Patent number 8,692,216
- Issue date Apr 8, 2014
- Sen Corporation
- Hiroyuki Kariya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 7,851,772
- Issue date Dec 14, 2010
- Sen Corporation an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION METHOD, ION IMPLANTER, AND METHOD FOR MANUFACTURIN...
- Publication number 20230140499
- Publication date May 4, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20180068829
- Publication date Mar 8, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND METHOD OF CONTROLLING THE SAME
- Publication number 20160013014
- Publication date Jan 14, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Tadanobu Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20140065737
- Publication date Mar 6, 2014
- SEN Corporation
- Shiro Ninomiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20130256566
- Publication date Oct 3, 2013
- SEN Corporation
- Hiroyuki KARIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20130196492
- Publication date Aug 1, 2013
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20120252194
- Publication date Oct 4, 2012
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION SYSTEM AND ION BEAM IRRADIATION METHOD
- Publication number 20110297842
- Publication date Dec 8, 2011
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20080251713
- Publication date Oct 16, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS

Toshio Yumiyama

Person

Patents Grantslast 30 patents

Ion implantation apparatus and ion implantation method

Ion implanter and method of controlling the same

Ion implantation method and ion implantation apparatus

Ion implantation method and ion implantation apparatus

Ion implantation method and ion implantation apparatus

Ion beam irradiation system and ion beam irradiation method

Ion implantation apparatus and control method thereof

Ion implantation apparatus and ion implantation method

Patents Applicationslast 30 patents

ION IMPLANTATION METHOD, ION IMPLANTER, AND METHOD FOR MANUFACTURIN...

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

ION IMPLANTER AND METHOD OF CONTROLLING THE SAME

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION BEAM IRRADIATION SYSTEM AND ION BEAM IRRADIATION METHOD

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD