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Toshiro Hayashi
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Fukushima-ken, JP
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last 30 patents
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Patent Grant
Method of manufacturing single crystal of silicon
Patent number
5,882,398
Issue date
Mar 16, 1999
Shin-Etsu Handotai Co., Ltd.
Susumu Sonokawa
C30 - CRYSTAL GROWTH
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Patent Grant
Equipment for producing silicon single crystals
Patent number
5,725,661
Issue date
Mar 10, 1998
Shin-Etsu Handotai Co., Ltd.
Izumi Fusegawa
C30 - CRYSTAL GROWTH