Toshiro Maekawa

Person

Sagamihara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for conveying a workpiece
- Patent number 6,595,220
- Issue date Jul 22, 2003
- Ebara Corporation
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate gripper device for spin drying
- Patent number RE37347
- Issue date Sep 4, 2001
- Ebara Corporation
- Toshiro Maekawa
- 034 - Drying and gas or vapor contact with solids
Information Patent Grant
Method and apparatus for conveying a workpiece
- Patent number 6,221,171
- Issue date Apr 24, 2001
- Ebara Corporation
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing method and washing apparatus
- Patent number 6,106,635
- Issue date Aug 22, 2000
- Ebara Corporation
- Satomi Hamada
- B08 - CLEANING
Information Patent Grant
Washing installation including plural washers
- Patent number 6,079,073
- Issue date Jun 27, 2000
- Ebara Corporation
- Toshiro Maekawa
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus
- Patent number 5,966,765
- Issue date Oct 19, 1999
- Ebara Corporation
- Satomi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for cleaning workpiece
- Patent number 5,868,866
- Issue date Feb 9, 1999
- Ebara Corporation
- Toshiro Maekawa
- B08 - CLEANING
Information Patent Grant
Method of and apparatus for cleaning workpiece
- Patent number 5,860,181
- Issue date Jan 19, 1999
- Ebara Corporation
- Toshiro Maekawa
- B08 - CLEANING
Information Patent Grant
Method for cleaning workpiece
- Patent number 5,846,335
- Issue date Dec 8, 1998
- Ebara Corporation
- Toshiro Maekawa
- B08 - CLEANING
Information Patent Grant
Substrate gripper device for spin drying
- Patent number 5,775,000
- Issue date Jul 7, 1998
- Ebara Corporation
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for conveying a workpiece
- Publication number 20010009157
- Publication date Jul 26, 2001
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS

Toshiro Maekawa

Person

Patents Grantslast 30 patents

Apparatus for conveying a workpiece

Substrate gripper device for spin drying

Method and apparatus for conveying a workpiece

Washing method and washing apparatus

Washing installation including plural washers

Cleaning apparatus

Method of and apparatus for cleaning workpiece

Method of and apparatus for cleaning workpiece

Method for cleaning workpiece

Substrate gripper device for spin drying

Patents Applicationslast 30 patents

Apparatus for conveying a workpiece